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  • 专利标题:   Graphene machining method used to prevent graphene edges from collapsing while preventing electric charges from remaining in a graphene ribbon, comprises irradiating gas cluster beam onto graphene.
  • 专利号:   US2015251913-A1, JP2015168593-A, KR2015105208-A, JP6196920-B2
  • 发明人:   MATSUMOTO T, DOBASHI K
  • 专利权人:   MATSUMOTO T, DOBASHI K, TOKYO ELECTRON LTD, TOKYO ELECTRON LTD
  • 国际专利分类:   C01B031/04, H01J037/305, C01B031/02, H01L021/302, C01B032/192
  • 专利详细信息:   US2015251913-A1 10 Sep 2015 C01B-031/04 201562 Pages: 13 English
  • 申请详细信息:   US2015251913-A1 US634948 02 Mar 2015
  • 优先权号:   JP043828

▎ 摘　　要

NOVELTY - Graphene machining method, comprises irradiating gas cluster beam (GCB) onto graphene. USE - The graphene machining method is useful to prevent graphene edges from collapsing while preventing electric charges from remaining in a graphene ribbon. ADVANTAGE - The graphene machining method: prevents damage of graphene ribbon by excessing ashing; and utilizes GCB of water molecules to selective obtain chemically stable armchair edges by a synergy effect with low oxidizing power of water molecules.