• 专利标题:   Thermo-mechanical resonating radiation detector i.e. thermo-mechanical micro-bolometer for array of radiation detectors, has set of silicon dioxide supports arranged between silicon substrate and graphene tethers for supporting tethers.
  • 专利号:   US2019277702-A1
  • 发明人:   ALEMAN B J, BLAIKIE A D, MILLER D J
  • 专利权人:   UNIV OREGON
  • 国际专利分类:   G01J005/02, G01J005/20
  • 专利详细信息:   US2019277702-A1 12 Sep 2019 G01J-005/20 201971 Pages: 12 English
  • 申请详细信息:   US2019277702-A1 US297384 08 Mar 2019
  • 优先权号:   US640552P, US297384

▎ 摘  要

NOVELTY - The detector has a set of graphene tethers (102) attached to a graphene resonator. A set of silicon dioxide supports is arranged between a silicon substrate and the graphene tethers for supporting the tethers to suspend the graphene resonator above the silicon substrate such that the graphene resonator forms a mechanical resonator. A micro-electronic circuitry electrically connects the graphene resonator and the silicon substrate. The graphene resonator and the graphene tethers include a discrete rotational symmetry around a point in a plane of the graphene resonator. A photodiode measures resonant frequency of the graphene resonator. USE - Thermo-mechanical resonating radiation detector i.e. thermo-mechanical micro-bolometer for an array of radiation detectors (claimed) used in astronomy, particle physics, and thermal imaging fields. ADVANTAGE - The detector allows AC electrical driving of absorber vibration together with a DC bias to be applied, and detection of absorber resonant frequency shift due to incident radiation. The detector detects change in mechanical resonance of a suspended graphene absorber instead of detecting change in electrical resistivity of a fixed graphene layer. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic illustration of a bolometer for sensing incident radiation by measuring shifts in resonant frequency of a micromechanical graphene absorber suspended by four tethers above a cylindrical well. Graphene tethers (102) Graphene layer (104) Cylindrical well (106) Electrical contact (112) Voltage (114)