▎ 摘 要
NOVELTY - Electrolyte comprises 1-5 g/L cobalt II ions, 1-10 g/L chloride ions, acid in an amount sufficient to obtain pH of 1.8-4, 0.05-10 g/L graphene or graphene oxide, and at least one organic additive other than graphene and graphene oxide in aqueous solution. The concentration of organic additive is 5-200 mg/l. The organic additive is a carboxylic acid comprising citric acid, tartaric acid, malic acid, mandelic acid, maleic acid, fumaric acid, glyceric acid, orotic acid, malonic acid, L-alanine, acetylsalicylic acid, and salicylic acid. The organic additive also includes an amine chosen from polyethyleneimines and benzotriazole. USE - The electrolyte is useful for electrodeposition of cobalt. ADVANTAGE - The electrolyte has resistance to corrosion, improved mechanical properties and minimizes native oxide reformation. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for manufacturing interconnect lines in semiconductor device by implementing electrodeposition step on conductive surface.