• 专利标题:   Electrolyte for electrodeposition of cobalt comprises cobalt II ions, chloride ions, graphene or graphene oxide, and at least one organic additive other than graphene and graphene oxide, where organic additive is carboxylic acid.
  • 专利号:   FR3124197-A1
  • 发明人:   MEVELLEC V, CAILLARD L, THIAM M, DOUSSOT C P
  • 专利权人:   AVENI
  • 国际专利分类:   C25D003/12, C25D009/04
  • 专利详细信息:   FR3124197-A1 23 Dec 2022 C25D-003/12 202304 Pages: 27 French
  • 申请详细信息:   FR3124197-A1 FR006572 21 Jun 2021
  • 优先权号:   FR006572

▎ 摘  要

NOVELTY - Electrolyte comprises 1-5 g/L cobalt II ions, 1-10 g/L chloride ions, acid in an amount sufficient to obtain pH of 1.8-4, 0.05-10 g/L graphene or graphene oxide, and at least one organic additive other than graphene and graphene oxide in aqueous solution. The concentration of organic additive is 5-200 mg/l. The organic additive is a carboxylic acid comprising citric acid, tartaric acid, malic acid, mandelic acid, maleic acid, fumaric acid, glyceric acid, orotic acid, malonic acid, L-alanine, acetylsalicylic acid, and salicylic acid. The organic additive also includes an amine chosen from polyethyleneimines and benzotriazole. USE - The electrolyte is useful for electrodeposition of cobalt. ADVANTAGE - The electrolyte has resistance to corrosion, improved mechanical properties and minimizes native oxide reformation. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for manufacturing interconnect lines in semiconductor device by implementing electrodeposition step on conductive surface.