• 专利标题:   Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.
  • 专利号:   US2018059534-A1, CN107792849-A, CN107797378-A, TW201811668-A, US10012899-B2, TW201820021-A
  • 发明人:   TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C
  • 专利权人:   TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD
  • 国际专利分类:   G03F001/62, H01L021/033, C01B032/194, C01B032/184, G03F007/20, G03F001/22, G03F001/64, C23C014/16, C23C016/26, C23C028/00, C23C014/18
  • 专利详细信息:   US2018059534-A1 01 Mar 2018 G03F-001/62 201818 Pages: 12 English
  • 申请详细信息:   US2018059534-A1 US356204 18 Nov 2016
  • 优先权号:   US382542P, US382579P, US356204, US356386

▎ 摘  要

NOVELTY - The method involves depositing (204) a first material layer over a first substrate, and depositing (206) a graphene layer over the first material layer. After depositing (208) an amorphous silicon layer over the graphene layer, the amorphous silicon layer is bonded (210) to a second substrate to form an assembly. The assembly is annealed (212) to convert the amorphous silicon layer to a silicon oxide layer. The first substrate and the first material layer are removed (214,216) from the assembly to expose the graphene layer. USE - Method of making a pellicle for use in EUV lithography system. ADVANTAGE - The graphene layer can be made thick enough to avoid breakages during the pellicle's manufacturing, assembling, and handling processes. DESCRIPTION OF DRAWING(S) - The drawing is a flowchart illustrating a method of making a pellicle for use in a EUV lithography system. First material layer depositing step (204) Graphene layer depositing step (206) Amorphous silicon layer depositing step (208) Amorphous silicon layer/second substrate bonding step (210) Assembly annealing step (212) First substrate/ first material layer removing steps (214,216)