• 专利标题:   Composite comprises single crystal sapphire substrate having film surface with surface roughness below preset value, metal film grown on film formation surface, and graphene film grown on metal film.
  • 专利号:   JP2017043536-A
  • 发明人:   AOTA N, AIDA H
  • 专利权人:   NAMIKI SEIMITSU HOSEKI KK
  • 国际专利分类:   C01B032/15, C01B032/18, C01B032/182, C23C016/26, C30B029/02
  • 专利详细信息:   JP2017043536-A 02 Mar 2017 C01B-032/15 201718 Pages: 7 Japanese
  • 申请详细信息:   JP2017043536-A JP161719 22 Aug 2016
  • 优先权号:   JP166433

▎ 摘  要

NOVELTY - A composite comprises a single crystal sapphire substrate having a film surface with a surface roughness of 5 nm or less, a metal film grown on the film formation surface, and a graphene film grown on the metal film. USE - Composite (claimed). ADVANTAGE - The graphene film peeled from the composite has high quality and crystallinity. The graphene film grows without being inhibited by the unevenness of the growth surface. The defect on the graphene film is eliminated. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) graphene film, which is obtained by peeling from the composite; (2) manufacture of composite, which involves preparing the single crystal sapphire substrate, epitaxially growing metal film on the sapphire substrate, and epitaxially growing the graphene film on the metal film; and (3) manufacture of graphene film.