• 专利标题:   Graphene contact resistance reducing method, involves forming source and drain electrode area on surface of thin film, forming hole in drain metal electrode, forming grid medium layer on film, and fixing gate with grid medium layer.
  • 专利号:   CN103943512-A, CN103943512-B
  • 发明人:   WANG H, JIANG M, XIE X, WU T, CHEN J, LU G, SUN Q, XIE H, ZHANG X
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   H01L021/28, H01L021/336
  • 专利详细信息:   CN103943512-A 23 Jul 2014 H01L-021/336 201468 Pages: 15 Chinese
  • 申请详细信息:   CN103943512-A CN10189193 07 May 2014
  • 优先权号:   CN10189193

▎ 摘  要

NOVELTY - The method involves forming a substrate by graphite dilute. A graphene surface is formed with a BN thin film. A graphene edge is fixed with a patterned source and a part of the BN thin film. Metal catalyst layer deposition operation is performed. A metal catalytic layer is coated with catalyst. A surface of the BN thin film is formed with a source and drain electrode area. A drain metal electrode is formed with a hole. The BN thin film is formed with a grid medium layer. A gate is fixed with the grid medium layer. A source and drain metal electrode is made of nickel material. USE - Graphene contact resistance reducing method. ADVANTAGE - The method enables effectively realizing graphene contact resistance reducing process, metal catalytic layer etching process and lower hydrogen atmosphere annealing process, forming the metal catalytic layer, a BN thin film at an edge of the graphene surface and a Zigzag edge with a hole structure and improving subsequently deposited source drain metal electrode strong chemical binding performance. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a graphene contact resistance reducing method.'(Drawing includes non-English language text)'