• 专利标题:   Photodetector for use in image sensor, comprises first electrode, collector layer on first electrode, tunnel barrier layer on collector layer, graphene layer on tunnel barrier layer, emitter layer on graphene layer, and second electrode on emitter layer comprising second semiconductor material.
  • 专利号:   US2022367745-A1
  • 发明人:   SHIN H, KIM H, LEE J, JO S
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   G01S017/931, G01S007/481, H01L027/146, H01L027/30, H01L031/02, H01L031/0224, H01L031/028, H01L031/032, H01L031/0352, H01L031/101, H01L031/107, H01S005/0687
  • 专利详细信息:   US2022367745-A1 17 Nov 2022 H01L-031/107 202298 English
  • 申请详细信息:   US2022367745-A1 US857466 05 Jul 2022
  • 优先权号:   KR157506

▎ 摘  要

NOVELTY - Photodetector (10) comprises a first electrode, a collector layer (12) on the first electrode, a tunnel barrier layer (13) on the collector layer, a graphene layer (14) on the tunnel barrier layer, an emitter layer (15) on the graphene layer, and a second electrode on the emitter layer. The collector layer includes a first semiconductor material and the emitter layer includes a second semiconductor material, where at least one semiconductor material of the first semiconductor material and the second semiconductor material includes a transition metal dichalcogenide that is a compound of a transition metal and a chalcogen element that is one of sulfur (S), selenium (Se), or Te (tellurium). The emitter layer has a thickness of about 0.3 nanometer (nm) to about 1 micros (µm) such that the emitter layer absorbs light and moves electrons and holes, and where the tunnel barrier layer has a thickness of about 0.3 nm to about 1 µm. USE - Photodetector i.e., avalanche photodetectors for use in image sensor. ADVANTAGE - A photodetector has a small form factor and having high detection efficiency with respect to both visible light and infrared rays. The avalanche photodetectors are configured to utilize a photo-doping effect associated with graphene. The infrared photodetectors to be manufactured with a small form factor so that they can be applied to smartphones or wearable devices. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an image sensor, which comprises a substrate, an insulating layer on the substrate, a first photodetector on the insulating layer, the first photodetector including the photodetector, such that the insulating layer is between the substrate and a first electrode of the first photodetector, and the first electrode of the first photodetector is between the insulating layer and a collector layer of the first photodetector, and a second photodetector on the first photodetector, where the second photodetector includes a separate collector layer, a separate tunnel barrier layer on the separate collector layer, a separate graphene layer on the separate tunnel barrier layer, a separate emitter layer on the separate graphene layer, and a separate second electrode on the separate emitter layer. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic cross-sectional view of an avalanche photodetector. 10Avalanche photodetector 12Collector layer 13Tunnel barrier layer 14Graphene layer 15Emitter layer