• 专利标题:   Regulating number of molybdenum disulfide layers in molybdenum disulfide/graphene heterojunction comprises using methane and hydrogen, placing polished copper foil into quartz tube and graphene-transferred silicon dioxide/ substrate.
  • 专利号:   CN112281137-A
  • 发明人:   XU K, ZHOU Y, LI P
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   C23C016/02, C23C016/26, C23C016/30, C23C016/44, C23C016/52, H01L021/02
  • 专利详细信息:   CN112281137-A 29 Jan 2021 C23C-016/30 202116 Pages: 18 Chinese
  • 申请详细信息:   CN112281137-A CN10970440 15 Sep 2020
  • 优先权号:   CN10970440

▎ 摘  要

NOVELTY - Regulating number of molybdenum disulfide layers in molybdenum disulfide/graphene heterojunction comprises (a) using methane and hydrogen as reaction source, placing polished copper foil into 2-inch diameter quartz tube, passing in 1% argon-hydrogen mixed gas, increase the temperature to 1050 degrees C and insulating for 20 minutes, naturally cooling to room temperature, (b) cutting copper foil with graphene into the required shape, sealing edge with tape and fix it on the PET, using PMMA solution, homogenizing glue at 1000 revolutions/minute for 10 second, washing film with deionized water, soaking for 10 minutes, (c) placing graphene-transferred silicon dioxide/silicon substrate in the tube furnace, obtaining different layers of molybdenum disulfide/graphene heterostructures by adjusting the quality of molybdenum pentachloride, (d) heating and (e) carrying out molybdenum disulfide/graphene heterojunction growth by maintaining two temperature zones for 5-30 minutes under carrier gas flow. USE - The method is useful for regulating number of molybdenum disulfide layers in molybdenum disulfide/graphene heterojunction. ADVANTAGE - The method controls the mass of the molybdenum pentachloride and effectively realizes the control of molybdenum disulfide layer number in the molybdenum disulfide/graphene hetero-junction.