• 专利标题:   Quartz boat structure for chemical vapor deposition device, comprises quartz boat main body having two ends provided with bearing beam, and two sides of upper end of bearing beam provided with rivet inserted in groove.
  • 专利号:   CN214422749-U
  • 发明人:   YE Q, WANG X, ZHANG L
  • 专利权人:   HANGZHOU YINGXIJIE YIHE INFORMATION TECHNOLOGY DEV CO LTD
  • 国际专利分类:   H01L021/673, C23C016/50, C23C016/458
  • 专利详细信息:   CN214422749-U 19 Oct 2021 C23C-016/458 202101 Chinese
  • 申请详细信息:   CN214422749-U CN20424229 26 Feb 2021
  • 优先权号:   CN20424229

▎ 摘  要

NOVELTY - The utility model claims a quartz boat structure for chemical vapour deposition device, belonging to the technical field of quartz boat, comprising a quartz boat main body; two ends of the quartz boat main body are provided with a bearing beam; between two ends of the bearing beam and the quartz boat main body are provided with a supporting column; the two sides of the upper end of the bearing beam are provided with a bearing beam connecting groove; two sides of the upper end of the bearing beam are provided with a rivet connected with the bearing beam groove and inserted in the inserting groove. The invention is featured with compact and simple structure, good stability and long service life. It solves the problem that the vertical graphene is difficult to grow at the same time on the surface of the substrate at the same time. the substrate will not be bent and deformed at high temperature, damaging the shape of the vertical graphene.