• 专利标题:   Optical nanolithography of two-dimensional materials, involves coating glass, quartz, silicon wafer or sapphire substrate with photoresist having quantum confinement effect, transferring two-dimensional material layer, and writing.
  • 专利号:   RO134920-A2
  • 发明人:   PAVEL E
  • 专利权人:   PAVEL E
  • 国际专利分类:   G03F007/00
  • 专利详细信息:   RO134920-A2 29 Apr 2021 G03F-007/00 202152 Pages: 1 English
  • 申请详细信息:   RO134920-A2 RO000630 07 Oct 2019
  • 优先权号:   RO000630

▎ 摘  要

NOVELTY - Optical nanolithography of two-dimensional materials involves coating a glass, quartz, silicon wafer or sapphire substrate with a photoresist having quantum confinement effect, transferring a layer of two-dimensional material such as graphene, boron nitride, molybdenum disulfide, molybdenum diselenide, tungsten disulfide and tungsten diselenide onto the photoresist, directly and continuously writing a geometric figure with a laser working in continuous or pulsed regime by using a laser diode, and using a network of laser beams which are individually controlled by a spatial light modulator. USE - Optical nanolithography of two-dimensional materials e.g. graphene, boron nitride, molybdenum disulfide, molybdenum diselenide, tungsten disulfide and tungsten diselenide for semiconductors.