• 专利标题:   Preparation of graphene metamaterial based on flat two-dimensional structure substrate involves using chemical vapor deposition method to generate graphene metamaterial with two-dimensional micro-nano mechanism.
  • 专利号:   CN113862636-A
  • 发明人:   YANG H, WU Z
  • 专利权人:   UNIV BEIJING JIAOTONG
  • 国际专利分类:   C23C016/02, C23C016/04, C23C016/26, C23C016/44
  • 专利详细信息:   CN113862636-A 31 Dec 2021 C23C-016/26 202223 Chinese
  • 申请详细信息:   CN113862636-A CN10922973 12 Aug 2021
  • 优先权号:   CN10922973

▎ 摘  要

NOVELTY - Preparation of graphene metamaterial based on flat two-dimensional structure substrate comprises designing graphene metamaterial with two-dimensional structure pattern according to requirements, generating engineering document, etching selected metal substrate according to designed graphene metamaterial two-dimensional structural pattern, filling the filling agent to etching portion, preventing graphene from growing to the side of substrate, polishing metal substrate, grinding excess filling agent to expose the substrate material, and making surface flat, and using chemical vapor deposition method to generate graphene metamaterials with two-dimensional micro nano mechanism. USE - The method is used for preparing graphene metamaterial based on flat two-dimensional structure substrate. ADVANTAGE - The method has low cost, and is not easy to damage the graphene material itself, ensuring the integrity of the graphene materials, at the same time, creating a flat substrate surface, which is more beneficial for graphene structure deposition. The method is capable of freely controlling form.