▎ 摘　　要

NOVELTY - The modulator has a silicon waveguide whose upper and lower portions are respectively provided with two symmetrical surface double-layer graphene and a metal structure. The double-layer graphene is separated by insulating material to form a graphene capacitor, where thickness of the single layer graphite is about 0.34nm. The insulating material is 10nm thick hexagonal boron nitride. A slit is fixed in transmission direction of a vertical waveguide, where a Fermi level of the graphene is adjusted by adding voltage on the graphene capacitor to adjust and control optical field in the waveguide. USE - Ultra-structure waveguide phase dynamic modulator for use in a micro-nano photonic device, a Mach-Zehnder interferometer or an annular resonator. ADVANTAGE - The modulator ensures consistent graphene of point so as to change a Fermi level of the graphene, and realizes phase control of an output signal. The modulator realizes optical switch, filtering, wave selecting and beam splitting function. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of an ultra-structure waveguide phase dynamic modulator.