• 专利标题:   Reaction gas supply device useful for preparing graphene by chemical vapor deposition method, comprises an air inlet pipe, an air outlet device and a current-limiting device.
  • 专利号:   CN209702857-U
  • 发明人:   HU Z, LIU H, JI H, TAN H
  • 专利权人:   WUXI SIXTH ELEMENT ELECTRONIC THIN FILM, WUXI GRAPHENE FILM CO LTD
  • 国际专利分类:   C23C016/26, C23C016/455
  • 专利详细信息:   CN209702857-U 29 Nov 2019 C23C-016/26 201994 Pages: 19 Chinese
  • 申请详细信息:   CN209702857-U CN20011976 04 Jan 2019
  • 优先权号:   CN20011976

▎ 摘  要

NOVELTY - The utility model claims a reaction gas supply device and a CVD method for preparing graphene by CVD method for producing cold wall furnace of graphite alkene, the reaction gas supplying device comprises an air inlet pipe, an air outlet device and a current limiting device; the air inlet pipe is sealing-connected with the air outlet device, the outlet device is hollow box body, the box body surface is provided with multiple air outlet holes, said current limiting device comprises a shell, a first port, a second port and a gas passage, wherein the air outlet device is set on the first port of the current-limiting device. and one surface of which is provided with air outlet hole is matched with the shape of the first port of the current-limiting device, the air flow from the air inlet pipe into the air outlet device, a gas passage and then discharged to the current-limiting device is comprised of the air hole of the air outlet device, gas from the first port to the second port. the cold wall furnace comprises the reaction gas supplying device and the furnace wall. the reaction gas supplying device can make gas uniformly through the graphene growth substrate, realizing batch growth and uniform growth of the graphene.