• 专利标题:   Method for growing graphene wafer, involves depositing and growing graphene wafer on sapphire or metal substrate by vapor deposition, and arranging sheet above metal substrate, and sheet is parallel to plane of metal substrate.
  • 专利号:   CN114657531-A
  • 发明人:   WANG Y, TANG J, YAN R, DU Y
  • 专利权人:   UNIV PEKING, BEIJING GRAPHENE INST
  • 国际专利分类:   C23C016/26, C23C016/455, C23C016/458
  • 专利详细信息:   CN114657531-A 24 Jun 2022 C23C-016/26 202267 Chinese
  • 申请详细信息:   CN114657531-A CN11529709 22 Dec 2020
  • 优先权号:   CN11529709

▎ 摘  要

NOVELTY - The method involves depositing and growing graphene wafer on a sapphire/metal substrate (2) by vapor deposition. The sheet is arranged above the metal substrate, and the sheet is parallel to the plane of the metal substrate. The distance between the metal substrate and satisfies the projection of the sheet in the vertical direction completely covers the metal substrate. The sheet is another sapphire/metal substrate and a sapphire sheet or film layer. The metal substrate is a metal single crystal film layer. The metal substrate is copper or copper-nickel single crystal film layer. The metal substrate is formed by magnetron sputtering. USE - Method for growing graphene wafer. ADVANTAGE - The growth process in the metal substrate is reduced atmosphere protection, The substrate surface not form oxidation spot, so as to avoid the substrate surface generate defect, which improves the quality of the growth of the wafer graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a carrier used for deposition growth graphene wafer. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the carrier. 1Boat frame 2Sapphire or metal substrate