• 专利标题:   Non-standard electrostatic force switch, has substrate fixed with graphene along arrangement direction, and support electrode connected with source and drain electrodes that are electrically connected together.
  • 专利号:   CN103964364-A, CN103964364-B
  • 发明人:   SU Y, YANG J, ZHU H, NIE P, GU K
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI, INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   B81B003/00, B81C001/00
  • 专利详细信息:   CN103964364-A 06 Aug 2014 B81B-003/00 201469 Pages: 10 Chinese
  • 申请详细信息:   CN103964364-A CN10035425 29 Jan 2013
  • 优先权号:   CN10035425

▎ 摘  要

NOVELTY - The switch has a substrate provided with an insulation layer and a back electrode. A source and drain electrodes are arranged on the substrate along first arrangement direction. The substrate is attached with a graphene layer along second arrangement direction. A support electrode is connected with the source and drain electrodes that are electrically connected together, where the graphene layer is a crystal structure layer. The insulation layer and back electrode are provided with a passivation protective layer. The source and drain electrodes are provided with a medium layer. USE - Non-standard electrostatic force switch. ADVANTAGE - The switch can use bias electrode between the source and drain electrodes, thus providing electrostatic force to pull the film bridge down, and has efficient deformation process to form a switch, small threshold voltage and compatible CMOS battery, and avoids usage of large driving circuit and reduces the size of micro-nano machinery switch. DETAILED DESCRIPTION - The source electrode, the drain electrode, the back electrode and support electrode are made of doped multi-crystal, metal or metal alloy, metal nitride materials. An INDEPENDENT CLAIM is also included for a non-standard electrostatic force switch manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a non-standard electrostatic force switch.