• 专利标题:   Device for large-scale continuously preparing vertically oriented graphene by plasma comprises e.g. vacuum chamber with baffle valve and connected to vacuum pump, and used to generating and emitting microwaves into vacuum chamber.
  • 专利号:   CN112794316-A
  • 发明人:   BO Z, YANG H, SU M, XU C
  • 专利权人:   ZJUHANGZHOU GLOBAL SCI TECHNOLOGICAL
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN112794316-A 14 May 2021 C01B-032/186 202152 Pages: 16 Chinese
  • 申请详细信息:   CN112794316-A CN11607149 30 Dec 2020
  • 优先权号:   CN11607149

▎ 摘  要

NOVELTY - Device for large-scale continuously preparing vertically oriented graphene by plasma comprises a vacuum chamber (1) with a baffle valve (3) and connected to a vacuum pump (2), and used to generating and emitting microwaves into the vacuum chamber, microwave power supply (6), magnetron, wave guide, antenna, tapered shielding tube and quartz tube. Feed roller, support roller and take-up roller for driving the substrate through the plasma reaction zone at the bottom of the quartz tube. A radiant heater (4) placed at the bottom of the cavity for controlling the temperature of the substrate. The radiant heater, feeding roller, receiving roller, supporting roller, and the quartz tube are installed in the vacuum chamber from bottom to top. The microwave power supply, magnetron and the waveguide are connected in sequence. One end of the antenna is fixed in the waveguide. The other end of the antenna extends into the quartz tube. The base material is wound on the feed roller. USE - Used as device for large-scale continuously preparing vertically oriented graphene by plasma. ADVANTAGE - The device realize the large-scale and continuous controllable preparation of vertically-oriented graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for continuously preparing vertically-oriented graphene by using the device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the device for large-scale continuously preparing vertically oriented graphene by plasma. Vacuum chamber (1) Vacuum pump (2) Baffle valve (3) Radiant heater (4) Microwave power supply (6)