• 专利标题:   Device for processing graphene chip, has control panel which is embedded on upper surface of film sticking machine main portion, and negative pressure film coating device which is located above wafer placing table in film sticking machine main portion.
  • 专利号:   CN212587458-U
  • 发明人:   LIN C
  • 专利权人:   LIN C
  • 国际专利分类:   H01L021/67
  • 专利详细信息:   CN212587458-U 23 Feb 2021 H01L-021/67 202128 Pages: 7 Chinese
  • 申请详细信息:   CN212587458-U CN21249816 30 Jun 2020
  • 优先权号:   CN21249816

▎ 摘  要

NOVELTY - The utility model claims a graphene chip processing device, the structure comprises: a sealing protective cover plate, a rolling film placing frame, a film sticking machine main body, a control panel; wafer placing table, further comprising a negative pressure film laminating device; the film sticking machine main body is a rectangular structure; the sealing protective cover plate is located above the film sticking machine main body; the sealing protective cover plate is movably connected with the film sticking machine main body through the rotating shaft; the film rolling placing frame is set at the back of the film sticking machine main body; the wafer placing table is horizontally installed in the film sticking machine main body; the control panel is embedded on the upper surface of the film sticking machine main body; the negative pressure film coating device is located above the wafer placing table in the film sticking machine main body; the utility model is provided with a negative pressure film coating device; when the wafer is coated, negative pressure is formed at the connecting position of the wafer and the film, so as to promote the film and wafer fast joint; at the same time, effectively avoiding bubble generation, improving the film quality.