• 专利标题:   Vertical lifting and rapid cooling graphene growth device has eight-inch quartz tube for graphene chemical vapor deposition growth, vacuum tube furnace, vertical guide rail, frame, water platform, vertical frame, and horizontal guide rails.
  • 专利号:   CN113321209-A
  • 发明人:   QIAN Z, LIANG H, ZHOU C
  • 专利权人:   SHENZHEN HUAMENG COMMUNICATION TECHNOLOG
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN113321209-A 31 Aug 2021 C01B-032/186 202190 Pages: 6 Chinese
  • 申请详细信息:   CN113321209-A CN10494315 07 May 2021
  • 优先权号:   CN10494315

▎ 摘  要

NOVELTY - A vertical lifting and rapid cooling graphene growth device comprises 8-inch quartz tube (2) used for graphene chemical vapor deposition (CVD) growth, vacuum tube electric furnace (7) used to control the growth temperature of graphene CVD, vertical guide rail (1), frame (3) at two ends, water platform (4), vertical frame (6), horizontal guide rails (8), and other supporting structures. USE - Vertical lifting and rapid cooling graphene growth device. ADVANTAGE - The device design can reduce graphene CVD device floor area, and shortens cooling time in CVD process. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the vertical lifting and rapid cooling graphene growth device. Vertical guide rail (1) 8-inch quartz tube (2) Frame (3) Water platform (4) Vertical frame (6) Vacuum tube furnace (7) Horizontal guide rail (8)