• 专利标题:   Producing hexagonal boron nitride or graphene two-dimensional composite material, involves obtaining obtaining germanium substrate, depositing hexagonal boron nitride on germanium substrate by controlling area and depositing graphene.
  • 专利号:   KR2314020-B1
  • 发明人:   LEE J, HYEON S H, HYEONG S
  • 专利权人:   UNIV AJOU IND ACAD COOP FOUND
  • 国际专利分类:   C23C016/26, C23C016/34, C23C016/52, H01L021/02
  • 专利详细信息:   KR2314020-B1 15 Oct 2021 H01L-021/02 202190 Pages: 13
  • 申请详细信息:   KR2314020-B1 KR053934 06 May 2020
  • 优先权号:   KR053934

▎ 摘  要

NOVELTY - Producing hexagonal boron nitride (h-BN)/graphene two-dimensional composite material involves obtaining germanium (Ge) substrate; depositing hexagonal boron nitride (h-BN) on the germanium (Ge) substrate by controlling an area; and depositing graphene on the surface of the substrate without hexagonal boron nitride (h-BN) by inputting a carbon source to the germanium (Ge) substrate on which the hexagonal boron nitride (h-BN) is partially formed. The hexagonal boron nitride (h-BN) is deposited on the germanium (Ge) substrate by controlling the area, then the area of hexagonal boron nitride (h-BN) is controlled as per the boron nitride deposition time. The boron nitride deposition time is controlled according to an equation with respect to the deposition area, and hexagonal boron nitride (h-BN) is deposited on the germanium (Ge) substrate by controlling the area. USE - Method for producing hexagonal boron nitride/graphene two-dimensional composite material. ADVANTAGE - The method enables to manufacture hexagonal boron nitride/graphene two-dimensional composite material in a simple and cost-effective manner. DETAILED DESCRIPTION - Producing hexagonal boron nitride (h-BN)/graphene two-dimensional composite material involves obtaining germanium (Ge) substrate; depositing hexagonal boron nitride (h-BN) on the germanium (Ge) substrate by controlling an area; and depositing graphene on the surface of the substrate without hexagonal boron nitride (h-BN) by inputting a carbon source to the germanium (Ge) substrate on which the hexagonal boron nitride (h-BN) is partially formed. The hexagonal boron nitride (h-BN) is deposited on the germanium (Ge) substrate by controlling the area, then the area of hexagonal boron nitride (h-BN) is controlled as per the boron nitride deposition time. The boron nitride deposition time is controlled according to an equation, that is Y(area, %)=21x ln(X,(deposition time, minutes)2)-102.34 with respect to the deposition area, and hexagonal boron nitride (h-BN) is deposited on the germanium (Ge) substrate by controlling the area. The graphene is further deposited on the surface of the substrate without hexagonal boron nitride (h-BN) by inputting a carbon source to the germanium (Ge) substrate on which the hexagonal boron nitride (h-BN) is partially formed using chemical vapor deposition method (CVD).