• 专利标题:   Graphene-based micro strip line wave absorption type optical modulator for use in integrated photonic device, has first electrode connected with second electrode, and strip-shaped silicon optical waveguide layer is fixed in third electrode.
  • 专利号:   CN106324869-A, CN106324869-B
  • 发明人:   LU R, YE S, LIU T, TIAN C, XIA R, CHEN D, ZHANG S, LIU Y
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   G02F001/03, G02F001/035
  • 专利详细信息:   CN106324869-A 11 Jan 2017 G02F-001/03 201716 Pages: 9 Chinese
  • 申请详细信息:   CN106324869-A CN11006448 16 Nov 2016
  • 优先权号:   CN11006448

▎ 摘  要

NOVELTY - The modulator has a silicon dioxide substrate formed with a silicon dioxide substrate layer (1) that is provided with a strip-shaped silicon optical waveguide layer (2). A first graphene strip (51) and a second graphene strip (52) are fixed in an upper surface of the strip-shaped silicon optical waveguide layer. The first graphene strip and the second graphene strip are formed with an insulating layer. A first electrode (61) is connected with a second electrode (62). The strip-shaped silicon optical waveguide layer is fixed with a third electrode (63). USE - Graphene-based micro strip line wave absorption type optical modulator for use in an integrated photonic device. ADVANTAGE - The modulator adopts micro travelling wave electrode design and microelectronic process, and has simple structure and less volume, and realizes wide modulation bandwidth obtaining and ultra-high speed optical signal modulation and demodulation process. DETAILED DESCRIPTION - The first graphene strip and the second graphene strip are formed as arc strip-shaped structure. The first graphene strip and the second graphene strip are made of single layer graphene or few-layer graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a graphene-based micro strip line wave absorption type optical modulator. Silicon dioxide substrate layer (1) Strip-shaped silicon optical waveguide layer (2) Graphene strips (51,52) Electrodes (61,62,63)