• 专利标题:   Device for quick and continuous preparation of graphene film with a large size has heat source, roll-to-roll unit, and gas bottle, where roll-to-roll unit drives catalytic metal thin layer to move, and crosses airtight quartz box.
  • 专利号:   CN102534766-A, CN102534766-B
  • 发明人:   LI C, WANG Z
  • 专利权人:   WUXI DILIUYUANSU HITECH DEV CO LTD, WUXI GEFEI ELECTRONIC THIN FILMS TECHNOL
  • 国际专利分类:   C23C016/26, C23C016/46, C23C016/54, C30B025/00, C30B029/02
  • 专利详细信息:   CN102534766-A 04 Jul 2012 C30B-025/00 201304 Pages: 6 Chinese
  • 申请详细信息:   CN102534766-A CN10047668 28 Feb 2012
  • 优先权号:   CN10047668

▎ 摘  要

NOVELTY - A quick and continuous preparation device comprises heat source, roll-to-roll unit, and gas bottle. Roll-to-roll unit drives catalytic metal thin layer to move, and crosses airtight quartz box. Protective gas, hydrogen and carbon source in gas bottle enter into the airtight quartz box through pipelines. Airtight quartz box is linked with vacuum pump to keep flowability of gas and relatively low gas pressure. Heat source is laser, which sends laser beams to conducting progressive scanning and heating through airtight quartz box exposure at surface of catalytic metal thin layer. USE - Device for quick and continuous preparation of graphene film with a large size. ADVANTAGE - The device solves problem that because whole of metal thin layer is heated, metal thin layer at high temperature is stressed for deformation even snap. It can realize uniform, quick, and continuous growth of graphene film with large size, and can control precisely growth sector of graphene film. DESCRIPTION OF DRAWING(S) - The drawing is a schematic diagram illustrating a quick and continuous preparation device.