▎ 摘 要
NOVELTY - The arrangement has a tunnel furnace and a copper-nickel foil moving device are arranged in a vacuum chamber. A point furnace and a tube-type linear gas supply device are set in the tunnel furnace. The copper-nickel foil moving device moves the copper-nickel foil to react with the deposition gas to crack and produce a single crystal graphene film. USE - Vacuum chamber tunnel furnace and tubular linear gas supply arrangement for production of graphene single crystal film. ADVANTAGE - The gas supply of the stabilized tubular linear gas supply device ensures the continuous production of large-area single crystal graphene. The large-area single-crystal graphene films are enabled to be produced in large quantities.