• 专利标题:   Preparation of graphene carbon nanotubes composite film for hybrid Schottky diode, involves using substrate whose entire or one surface is graphene catalyst, performing electroplating and carrying out chemical vapor deposition.
  • 专利号:   CN108070891-A
  • 发明人:   YANG L, CHEN Z, XU X, ZHANG J, YIN L, WU H, LIAO W, LI Q, BECK T J
  • 专利权人:   UNIV SHANGHAI, JIATE SEMICONDUCTOR TECHNOLOGY SHANGHAI
  • 国际专利分类:   C23C016/26, C23C028/04, C25D009/04, H01L023/373, H01L023/42, H01L023/492
  • 专利详细信息:   CN108070891-A 25 May 2018 C25D-009/04 201838 Pages: 10 Chinese
  • 申请详细信息:   CN108070891-A CN11022144 16 Nov 2016
  • 优先权号:   CN11022144

▎ 摘  要

NOVELTY - The preparation of graphene carbon nanotubes composite film, involves (1) using substrate whose entire or one surface is graphene catalyst, (2) performing electroplating to attach carbon nanotubes to surface of substrate, such that carbon nanotubes do not cover graphene catalyst, and (3) carrying out chemical vapor deposition to continue growing graphene on side of substrate with graphene catalyst. USE - Preparation of graphene carbon nanotubes composite film for hybrid Schottky diode (claimed). ADVANTAGE - The method enables preparation of graphene carbon nanotubes composite film ensuring enhanced contact and increased adhesion. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) graphene carbon nanotubes composite film; and (2) application of graphene carbon nanotubes composite film for hybrid Schottky diode.