• 专利标题:   High-precision graphene sensor, has heat conducting layer whose bottom part is fixedly connected with electric insulating layer, where bottom part of electric insulating layer is fixedly connected with corrosion resistant layer.
  • 专利号:   CN211977951-U
  • 发明人:   YAN H, LU W
  • 专利权人:   HUAYING ELECTRIC MOTOR SCITECH CO LTD
  • 国际专利分类:   G01D005/12
  • 专利详细信息:   CN211977951-U 20 Nov 2020 G01D-005/12 202098 Pages: 7 Chinese
  • 申请详细信息:   CN211977951-U CN20653819 26 Apr 2020
  • 优先权号:   CN20653819

▎ 摘  要

NOVELTY - The utility model claims a high precision graphene sensor, comprising a graphene sensor main body, the graphene sensor main body comprises a sensitive layer, the bottom of the sensitive layer is fixedly connected with a heat conducting layer; the bottom of the heat conducting layer is fixedly connected with an electric insulating layer; the bottom of the electric insulating layer is fixedly connected with a corrosion resistant layer, the bottom of the corrosion resistant layer is fixedly connected with a silicon substrate layer; the sensitive layer is a single atom layer graphene film; two ends of the sensitive layer are respectively provided with a metal conductive electrode. The utility model through the graphene sensor main body, a sensitive layer, a heat conducting layer, an electric insulating layer, a corrosion resistant layer and a silicon substrate layer matched with each other, the sensor becomes smaller, lighter, more sensitive, capable of detecting smaller change, faster working, solving the problem that the current sensor is limited by the manufacturing material, the precision of the sensor is not enough, bringing inconvenience to the use of people.