• 专利标题:   Carbon dioxide gas sensor, has non-continuous thin film deposited on oxygen graphene that is provided with carbon dioxide sensitive thin film, where carbon dioxide sensitive thin film is fixed between inter-digital electrodes.
  • 专利号:   CN103645216-A
  • 发明人:   HUANG J, XIE T, TAI H, DU X, JIANG Y, XIE G, ZHOU Y
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   G01N027/04
  • 专利详细信息:   CN103645216-A 19 Mar 2014 G01N-027/04 201432 Pages: 7 Chinese
  • 申请详细信息:   CN103645216-A CN10728757 25 Dec 2013
  • 优先权号:   CN10728757

▎ 摘  要

NOVELTY - The sensor has a substrate (1) provided with inter-digital electrodes (2) that are deposited on surface of a granular support to form a non-continuous thin film (4). The non-continuous thin film is deposited on oxygen graphene that is provided with a carbon dioxide sensitive thin film (3). The carbon dioxide sensitive thin film is fixed between the inter-digital electrodes, where the substrate is made of silicon dioxide or silicon material. USE - Carbon dioxide gas sensor. ADVANTAGE - The sensor has wide popularization and application. The carbon dioxide sensitive thin film supports carbon dioxide gas molecule along three-dimensional direction and graphene oxide material contact. The sensor effectively improves carbon dioxide gas molecule and property of carbon dioxide sensitive film thickness, has quick response, and reduces desorption of carbon dioxide gas. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a carbon dioxide gas sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a carbon dioxide gas sensor. Substrate (1) Inter-digital electrodes (2) Carbon dioxide sensitive thin film (3) Non-continuous thin film (4)