▎ 摘　　要

NOVELTY - The device has a layer of a non-conducting material and a layer of a semi-metal that is arranged on the layer of the non-conducting material. An electrode is in electrical contact to the layer of the semi-metal. An electrical source of a voltage or current is connected to two electrodes. The semi-metal is graphene. The non-conducting material is hexagonal boron nitride. (Incomplete specification, abstract based on available information published by the patent office). USE - Device of lithographic apparatus for measuring contamination such as carbon based contamination. ADVANTAGE - The cost time is reduced. The availability of the device is increased. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for measuring contamination. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the device of lithographic apparatus for measuring contamination. Laser system (1) Laser beam (2) Fuel emitter (3) Plasma formation region (4) Near-normal incidence radiation collector (5)