• 专利标题:   Preparing silicon nitride ceramic copper-clad plate for semiconductor component, involves weighing raw material alpha-silicon nitride, beta-silicon nitride, silicon carbide and sintering auxiliary agent, using silicon nitride graphene ball milling modification, and preparing mixed powder.
  • 专利号:   CN115483112-A
  • 发明人:   TAN C, LIU W, CHEN Z, ZHANG C, LIN W
  • 专利权人:   FUJIAN JIAYI SEMICONDUCTOR MATERIAL CO
  • 国际专利分类:   C04B035/584, C04B035/622, C04B035/645, H01L021/48, H01L023/373, H01L023/498
  • 专利详细信息:   CN115483112-A 16 Dec 2022 H01L-021/48 202306 Chinese
  • 申请详细信息:   CN115483112-A CN11242099 11 Oct 2022
  • 优先权号:   CN11242099

▎ 摘  要

NOVELTY - Preparing silicon nitride ceramic copper-clad plate involves weighing raw material alpha-silicon nitride (Si3N4), beta-Si3N4, silicon carbide (SiC) and sintering auxiliary agent according to mass ratio of 75-85:5-15:5, using Si3N4graphene ball milling modification, preparing mixed powder, preparing SiC-Si3N4ceramic, preparing oxidation graphene, taking graphene as adhesive between copper base body and ceramic base body, preparing oxidized graphene-based heat conducting adhesive for bonding between copper base body and ceramic substrate, compacting and attaching graphene copper matrixes to two sides of SiC-Si3N4 composite ceramic. USE - Method for preparing silicon nitride ceramic copper-clad plate used for semiconductor component. ADVANTAGE - The method enables to have improved heat conducting performance and mechanical property. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a silicon nitride ceramic copper-clad plate, which is prepared by preparation method, comprising two copper base bodies arranged in parallel, and SiC-Si3N4composite ceramic plate base body adhered between two copper base bodies by heat-conducting adhesive.