• 专利标题:   Method for preparing graphene film on insulating substrate, involves feeding mixed gas of argon and hydrogen, and heating camphor, and lowering temperature after graphene growth step is completed.
  • 专利号:   TW762205-B1, TW202233521-A
  • 发明人:   TSAI D, UEN W, CHIANG P
  • 专利权人:   UNIV CHUNG YUAN CHRISTIAN
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   TW762205-B1 21 Apr 2022 C01B-032/186 202257 Pages: 10 Chinese
  • 申请详细信息:   TW762205-B1 TW106103 22 Feb 2021
  • 优先权号:   TW106103

▎ 摘  要

NOVELTY - A method for preparing a graphene film on an insulating substrate is provided, including the following steps. In the atmospheric environment, the insulating substrate is wrapped with and closely attached to a copper foil, and placed in a chemical vapor deposition furnace tube. After that, argon gas is introduced into the chemical vapor deposition furnace tube at a first flow rate and a temperature of the chemical vapor deposition furnace tube is raised. When the temperature is raised to a target temperature, the argon gas is converted to a second flow rate of hydrogen, and thermal annealing is performed. Next, a graphene growth step is performed on the insulating substrate, and a mixed gas of argon and hydrogen is introduced, and camphor is heated. After the graphene growth step is completed, the temperature is lowered.