▎ 摘　　要

NOVELTY - Manufacturing nitrogen dioxide gas sensor comprises synthesizing graphene material film directly on the surface of a silicon carbide substrate by thermodynamic technique in a high vacuum or a low vacuum media comprising Argon gas, for forming silicon carbide base plate covered with a homogeneous graphene film suitable for manufacturing nitrogen dioxide gas sensors, where the silicon carbide baseplate is coated with homogenous graphene material and then etched with a nitrogen dioxide sensitive sensor structure and surrounding resistive structure to heat the sensor during operation. USE - The method is useful for: manufacturing nitrogen dioxide gas sensor. ADVANTAGE - The method enables direct generation of monolayer graphene on the surface of a silicon carbide substrate suitable for large-scale production and enables the creation of a dual-sensor structure on a single silicon carbide substrate to reduce the size and reduce the product price.