• 专利标题:   Preparing large-area palladium sulfide or/and palladium disulfide nano-film useful in light detector, and catalyst, comprises e.g. evaporating palladium metal nano-films of different thicknesses to substrate by electron beam evaporation coating device, and passing argon gas into reaction chamber.
  • 专利号:   CN115874151-A
  • 发明人:   HE L, XIAO J, HAO Y, GAO H, HAO G
  • 专利权人:   UNIV XIANGTAN
  • 国际专利分类:   C01G055/00, C23C014/18, C23C014/30, C23C014/58
  • 专利详细信息:   CN115874151-A 31 Mar 2023 C23C-014/30 202336 Chinese
  • 申请详细信息:   CN115874151-A CN11050004 30 Aug 2022
  • 优先权号:   CN11050004

▎ 摘  要

NOVELTY - Preparing large-area palladium sulfide or/and palladium disulfide nano-film comprises (1) evaporating palladium metal nano-films of different thicknesses to substrate by electron beam evaporation coating device, (2) placing alumina boat with sulfur powder into heating center of first temperature zone, placing silica substrate evaporated with palladium in second temperature zone heating center of dual temperature zone tube furnace, (3) passing argon gas into reaction chamber in tube furnace for cleaning, (4) heating tube furnace so that the temperature in the first temperature zone to 200-300℃, and heating second temperature zone to 400-600℃ for vulcanization, and (5) cooling, and turning off argon gas to obtain large-area palladium sulfide or/and palladium disulfide nano-film. USE - The method is useful for preparing large-area palladium sulfide or/and palladium disulfide nano-film, which is useful in light detector, catalyst, sensor, acid-resistant high temperature electrode, and solar cell. ADVANTAGE - The nano-film has high controllability, and is stable under normal temperature atmospheric environment, and provides a guarantee for further research of the physical property of the palladium metal nano-film and the mixed phase nano-material.