• 专利标题:   Chemical vapor deposition apparatus for preparation of graphene, has slide rail whose ends are set with telescopic cylinders, and slide blocks which are fixedly connected with electric machines respectively.
  • 专利号:   CN203794983-U
  • 发明人:   LIU C, LIAN R
  • 专利权人:   XIAMEN XICHENG NEW MATERIAL TECHNOLOGY
  • 国际专利分类:   C23C016/26, C23C016/44, C23C016/455
  • 专利详细信息:   CN203794983-U 27 Aug 2014 C23C-016/44 201477 Pages: 10 Chinese
  • 申请详细信息:   CN203794983-U CN20056530 29 Jan 2014
  • 优先权号:   CN20056530

▎ 摘  要

NOVELTY - This utility new type relates to a one with slide rail used for preparation of graphene of chemical vapour deposition device, comprise one quartz tube, quartz tube input end through first flange connect with inflation system, quartz tube output end through a connecting flange with an outer pneuma pressure regulator and vacuum system, quartz tube is surrounded by subsection heating device, heating device comprise first heating device and second heating device, first heating device and second heating device set with a slide rail, a slide rail can slide up the slide rail set with a slide block, a slide rail one side set with telescopic cylinder, telescopic cylinder pushes the slide block sliding up on the slide rail, a slide block fixed with a motor, a motor rotating shaft fixed with a bevel gear, a first time heating device and a second heating device set with the inclined gear of tooth engagement of the bevel gear, the bevel gear through tooth and the inclined gear to drive the first heating device and second heating device around the quartz tube axial direction rotate, this utility new type can make the gas uniform distribution so that the graphene uniform deposition.