• 专利标题:   Etching of multi-layered graphene involves forming multi-layered graphene on substrate, forming bands with specific height on substrate, annealing substrate by supplying argon/hydrogen, and then naturally cooling substrate.
  • 专利号:   CN102701144-A, CN102701144-B
  • 发明人:   FU Y, HU B, HUANG R, WEI Z, ZHANG X, YE T
  • 专利权人:   UNIV PEKING
  • 国际专利分类:   B81C001/00
  • 专利详细信息:   CN102701144-A 03 Oct 2012 B81C-001/00 201304 Pages: 7 Chinese
  • 申请详细信息:   CN102701144-A CN10213819 25 Jun 2012
  • 优先权号:   CN10213819

▎ 摘  要

NOVELTY - Multi-layered graphene is formed on a substrate and bands with height of 1-300 nm with space of less than 10 nm between them are formed on surface of substrate. The substrate is subjected to argon/hydrogen annealing at 600-1100 degrees C for 30 minutes to 3 hours, naturally cooled to room temperature, temperature is increased, and further cooled, to obtain etched multi-layered graphene. The flow rate of argon and hydrogen is 100-500 sccm and 10-50 sccm, respectively. USE - Etching of multi-layered graphene. ADVANTAGE - The method efficiently and economically provides smooth-edged multi-layered graphene.