▎ 摘　　要

NOVELTY - The infrared thermopile detector has a graphene oxide film (8) which is provided on an infrared absorption layer (7) of the infrared thermopile detector. The thickness of the graphene oxide film is 10-500 nm. The thickness of the graphene oxide film is 20-100 nm. The infrared thermopile detector comprises a substrate (1), a dielectric support layer (2), a thermopile assembly (9), an infrared absorption layer and the graphene oxide film. A concave thermal isolation cavity is provided in the center of the substrate. The dielectric support layer is arranged above the substrate, covers the concave thermally isolated cavity and is supported by a peripheral frame of the substrate. The dielectric support layer is a silicon dioxide film or a silicon nitride film. The infrared absorption layer is a silicon nitride film or a silicon nitride-silicon oxide composite film. USE - Graphene oxide-assisted infrared thermopile detector. ADVANTAGE - The graphene oxide film has the characteristics of insulation, low thermal conductivity and strong infrared absorption to improve the infrared absorption rate, thus, improving the infrared thermopile detector. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of an infrared thermopile detector. Substrate (1) Dielectric support layer (2) Infrared absorption layer (7) Graphene oxide film (8) Thermopile assembly (9)