▎ 摘　　要

NOVELTY - Manufacture of graphene-grown substrate involves forming a substrate having a substrate layer, carrying out low-pressure chemical vapor deposition by supplying a carbon-containing gas, adsorbing hydrocarbon radicals, diffusing, and heteroepitaxially growing on the surface of substrate layer without providing a catalyst layer on the substrate layer. USE - Manufacture of graphene-grown substrate used in manufacture of electronic component (all claimed). ADVANTAGE - The method enables manufacture of graphene-grown substrate without using catalyst. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) graphene-grown substrate; (2) electronic component, which is equipped with the graphene-grown substrate; (3) manufacturing device of graphene-grown substrate; and (4) gas injection unit.