▎ 摘 要
NOVELTY - A graphene thin film is synthesized by using a solid carbon source containing carbon element, liquid carbon source, and/or gaseous carbon source material for energy particle technology processing to produce active carbon atoms or carbon-containing active group; and depositing the active carbon atoms or carbon-containing active group on substrate to form graphene film on the substrate. The substrate is catalytically active or has no catalytic activity. USE - Method for synthesizing graphene thin film (claimed) used for optoelectronic device. ADVANTAGE - The method has high selectivity and no special requirement of carbon source material and substrate material, and can easily control size and structure of graphene thin film growth, and is suitable for large scale production.