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  • 专利标题:   Graphene nano hole structure for carrier, has carrier table whose top surface comprises concentric circular holes, and copper mesh or silicon nitride layer formed on surface of carrier.
  • 专利号:   CN202307785-U
  • 发明人:   HE L, XU F, XU T, YIN K, SUN L, XIE X
  • 专利权人:   UNIV SOUTHEAST
  • 国际专利分类:   B82Y040/00, H01J037/20
  • 专利详细信息:   CN202307785-U 04 Jul 2012 H01J-037/20 201255 Pages: 5 Chinese
  • 申请详细信息:   CN202307785-U CN20441937 10 Nov 2011
  • 优先权号:   CN20441937

▎ 摘　　要

NOVELTY - The structure has a carrier table i.e. column body, whose top surface comprises concentric circular holes, where the carrier table includes a superior arc section and a straight line. A copper mesh or silicon nitride layer is formed on the surface of the carrier. USE - Graphene nano hole structure for a carrier. DESCRIPTION OF DRAWING(S) - The drawing shows a side view of a graphene nano hole structure for a carrier.