• 专利标题:   Non-doped semiconductor device for system on chip (SoC), has planar memory device which is two-dimensionally integrated with memory unit cells having layer of non-doped semiconductor channel material, and SoC that comprises non-memory unit.
  • 专利号:   CN113270419-A
  • 发明人:   AN X, QIU C, XU L
  • 专利权人:   BEIJING YUANXIN CARBONBASED INTEGRATED, UNIV PEKING, BEIJING HUATANYUANXIN ELECTRONIC TECHNOL
  • 国际专利分类:   H01L027/11568, H01L027/1157, H01L027/11578
  • 专利详细信息:   CN113270419-A 17 Aug 2021 H01L-027/11568 202175 Pages: 22 Chinese
  • 申请详细信息:   CN113270419-A CN10094704 16 Feb 2020
  • 优先权号:   CN10094704

▎ 摘  要

NOVELTY - The device has a planar memory device which is two-dimensionally integrated with the memory unit cells having a layer (102) of non-doped semiconductor channel material. The SoC comprises a non-memory unit. The non-memory unit comprises digital, logic, analogue, digital/analogue mixed or radio frequency device. The memory unit is a NAND or NOR memory unit. The non-doped semiconductor channel material layer is selected from carbon nano-tube or two-dimensional material. The two-dimensional material is selected from molybdenum disulfide, molybdenum diselenide, boron nitride, tungsten diselenide, graphene or black phosphorus. The patterned source/drain contact layer is provided with planar memory device or array composed of a memory device unit. USE - Non-doped semiconductor device for system on chip (SoC). ADVANTAGE - The non-doped semiconductor device utilizes the characteristics that the undoped semiconductor channel material layer does not need to undergo high-temperature annealing and high-temperature ion implantation. The FET devices and memory devices are integrated on the same chip, including two-dimensional integrated or three-dimensional integrated structures, so that an integrated circuit composed of two-dimensional FET and an embedded memory integrated SoC, or two-dimensional (2D) or integration of three-dimensional (3D) SoC are formed with any combination of 2D or 3D storage. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing the non-doped semiconductor device for SoC. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view that shows a channel layer and an insulating layer formed on a substrate having a buffer layer. Substrate (101) Non-doped semiconductor channel material layer (102) Gate insulating layer (103) Insulating layer (104)