• 专利标题:   Optical element comprises substrate, multilayer graphene provided on substrate, electrode connected to multilayer graphene, and another electrode connected to multilayer graphene.
  • 专利号:   JP2022147762-A
  • 发明人:   KONDO O
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   B82Y020/00, B82Y030/00, B82Y040/00, C01B032/186, G01J001/02, H01L021/336, H01L029/786, H01L031/08, H01L051/05, H01L051/30
  • 专利详细信息:   JP2022147762-A 06 Oct 2022 H01L-029/786 202294 Pages: 27 Japanese
  • 申请详细信息:   JP2022147762-A JP049148 23 Mar 2021
  • 优先权号:   JP049148

▎ 摘  要

NOVELTY - Optical element comprises a substrate, a first multilayer graphene provided on the substrate and having a thickness of ≤ 5 nm, a first electrode connected to the first multilayer graphene, and a second electrode connected to the first multilayer graphene. USE - As optical element. ADVANTAGE - The optical element has improved light absorption efficiency. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing the optical element, which involves forming a multi-layered graphene having a thickness of ≤ 5 nm provided on the substrate, patterning the multi-layered graphene by an etching process using a mask to form a first multi-layered graphene, and forming a first electrode and a second electrode connected to the first multilayer graphene.