• 专利标题:   Electron-emitting element for use in electron guns, consists of carbon film of graphene structure provided in portion(s) of surface of metallic substrate containing carbon and metallic element(s) which forms compound.
  • 专利号:   JP2010015966-A
  • 发明人:   FUJIEDA T, OKAI M
  • 专利权人:   HITACHI HIGH TECHNOLOGIES CORP
  • 国际专利分类:   H01J001/14, H01J037/073, H01J009/04
  • 专利详细信息:   JP2010015966-A 21 Jan 2010 H01J-001/14 201009 Pages: 13 Japanese
  • 申请详细信息:   JP2010015966-A JP268075 17 Oct 2008
  • 优先权号:   JP148710

▎ 摘  要

NOVELTY - An electron-emitting element consists of a carbon film (207) of graphene structure provided in portion(s) of the surface of a metallic substrate containing carbon and metallic element(s) which forms a compound. USE - Electron-emitting element is used in electron guns of electron microscope apparatuses and electron beam drawing apparatuses (all claimed). ADVANTAGE - The electron-emitting element enables long-term stabilization of emission electric current, and can be manufactured with high yield. When the carbon thin film is damaged, it can be repaired at the vicinity of electron-emission site by supplying a carbon material from the carbon source provided in the electron-emitting element. Noise of emission electric current is reduced. The electron-emitting element has excellent durability and operational stability, and narrow electron-emission site region. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) electron gun; (2) electron microscope apparatus; (3) electron beam drawing apparatus; and (4) manufacture of electron-emitting element. DESCRIPTION OF DRAWING(S) - The drawing shows an explanatory view of the electron-emitting element. Tungsten needle (204) Carbon thin film coated region (205) Carbide layer or carbon-metal solid solution layer (206) Carbon film (207)