▎ 摘 要
NOVELTY - An electron-emitting element consists of a carbon film (207) of graphene structure provided in portion(s) of the surface of a metallic substrate containing carbon and metallic element(s) which forms a compound. USE - Electron-emitting element is used in electron guns of electron microscope apparatuses and electron beam drawing apparatuses (all claimed). ADVANTAGE - The electron-emitting element enables long-term stabilization of emission electric current, and can be manufactured with high yield. When the carbon thin film is damaged, it can be repaired at the vicinity of electron-emission site by supplying a carbon material from the carbon source provided in the electron-emitting element. Noise of emission electric current is reduced. The electron-emitting element has excellent durability and operational stability, and narrow electron-emission site region. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) electron gun; (2) electron microscope apparatus; (3) electron beam drawing apparatus; and (4) manufacture of electron-emitting element. DESCRIPTION OF DRAWING(S) - The drawing shows an explanatory view of the electron-emitting element. Tungsten needle (204) Carbon thin film coated region (205) Carbide layer or carbon-metal solid solution layer (206) Carbon film (207)