• 专利标题:   Apparatus for manufacturing device used for preparing graphene for electronic circuit, comprises graphene structure including metal catalyst layer formed on substrate, protection layer, and graphene layer, and power unit.
  • 专利号:   EP2690198-A2, US2014030857-A1, KR2014014914-A, CN103579043-A, EP2690198-A3, US8877572-B2, CN103579043-B, EP2690198-B1, KR1920718-B1
  • 发明人:   LEE J, JUNG Y, KIM Y, LEE C, MOON C, LEE J H, JUNG Y S, KIM Y S, LEE C S, MOON C Y, MUN Z R
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   C01B031/02, C25B001/00, C25B009/00, C25D017/00, H01L029/66, H01L021/02, H01L021/336, H01L029/78, H01L021/04, H01L021/67, C25F005/00, B82Y040/00, C25F007/00
  • 专利详细信息:   EP2690198-A2 29 Jan 2014 C25B-001/00 201410 Pages: 16 English
  • 申请详细信息:   EP2690198-A2 EP162775 08 Apr 2013
  • 优先权号:   KR082239

▎ 摘  要

NOVELTY - A graphene device-manufacturing apparatus (100) comprises an electrode, a graphene structure including a metal catalyst layer formed on a substrate (210), a protection layer, and a graphene layer (240) formed between the metal catalyst layer (230) and protection layer (250), and a power unit (150) configured to apply voltage between the electrode and the metal catalyst layer, and an electrolyte in which graphene structure is at least partially submerged. USE - Apparatus is used for manufacturing device for preparing graphene (claimed) used as base material for electronic circuit. ADVANTAGE - The apparatus efficiently and economically provides graphene device of high quality. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for graphene device manufacturing method, which involves forming a graphene structure including a metal catalyst layer on a substrate, a protection layer, and a graphene layer between the metal catalyst layer and protection layer, separating the metal catalyst layer from the substrate by generating bubbles due to chemical reactions occurring in an area between the substrate and the metal catalyst layer, removing the metal catalyst layer separated from the substrate from the graphene structure, forming a target insulation layer to be contacted with the graphene layer on a target substrate, contacting the graphene layer on the target insulation layer on the target substrate, and removing the protection layer from the graphene structure, after contacting the graphene layer on the target insulation layer. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic structure of graphene device-manufacturing apparatus. Apparatus (100) Electrolyte (120) Electrode (130) Power unit (150) Substrate (210) Metal catalyst layer (230) Graphene layer (240) Protection layer (250)