• 专利标题:   Doped silicon composite double-layer structure terahertz modulator comprises a substrate that is provided with an insulation layer, metal-doped silicon semiconductor layer, graphene thin film and pump laser beam.
  • 专利号:   CN105824138-A, CN105824138-B
  • 发明人:   CHEN Z, LIU C, SHEN Y, WEN Q, YIN L, YANG Q, ZHANG H, LI J
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   G02F001/01
  • 专利详细信息:   CN105824138-A 03 Aug 2016 G02F-001/01 201657 Pages: 10 Chinese
  • 申请详细信息:   CN105824138-A CN10228317 13 Apr 2016
  • 优先权号:   CN10228317

▎ 摘  要

NOVELTY - The doped silicon composite double-layer structure terahertz modulator comprises a substrate (1) that is provided with an insulation layer (2), metal-doped silicon semiconductor layer (3), graphene thin film (4) and pump laser beam (5). The metal-doped silicon semiconductor layer uses intrinsic N-type high flame-retardant silicon or intrinsic silicon. The doping metal is gold or platinum. The graphene thin film is provided with graphite alkene on a belt. USE - Doped silicon composite double-layer structure terahertz modulator. ADVANTAGE - The doped silicon composite double-layer structure terahertz modulator comprises a substrate that is provided with an insulation layer, metal-doped silicon semiconductor layer, graphene thin film and pump laser beam, and hence increases modulation depth of modulating terahertz wave, and decreases insertion loss. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a doped silicon composite double-layer structure terahertz modulator. Substrate (1) Insulation layer (2) Metal-doped silicon semiconductor layer (3) Graphene thin film (4) Pump laser beam (5)