• 专利标题:   Formation of graphene film used for electronic devices, involves forming metal film containing nickel or cobalt on sapphire substrate and subjecting to primary and secondary heat treatment.
  • 专利号:   JP2011178617-A
  • 发明人:   NOZAWA K, YOSHII S
  • 专利权人:   PANASONIC CORP
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   JP2011178617-A 15 Sep 2011 C01B-031/04 201162 Pages: 7 Japanese
  • 申请详细信息:   JP2011178617-A JP045132 02 Mar 2010
  • 优先权号:   JP045132

▎ 摘  要

NOVELTY - A metal film containing nickel or cobalt is provided on a substrate. The resultant substrate is subjected to primary heat treatment under hydrogen gas atmosphere and recrystallized to form epitaxial metal film on the substrate. The resultant substrate is subjected to secondary heat treatment under mixed gas containing methane gas and hydrogen gas atmosphere to obtain graphene film on substrate. The substrate is sapphire substrate. USE - Formation of graphene film used for electronic devices. ADVANTAGE - The method provides high-quality graphene film. DESCRIPTION OF DRAWING(S) - The drawing shows the block diagram of formation of graphene film. (Drawing includes non-English language text).