▎ 摘　　要

NOVELTY - This new utility model claims Si/SiO2/ graphene/multi-layer structure high performance hydrogen sensor. Si/sio2/ graphene/palladium layer structure multi-high performance hydrogen sensor, comprising substrate and substrate surface cover the sensing thin film, wherein the sensor film is Si/SiO2, graphite layer and palladium crystal grain layer according to order of bottom to top in turn is formed by composite of Si/SiO2/ graphene/multi-layer composite structure. Measuring the hydrogen gas of high sensitivity, response and recovery time short, measuring beyond hydrogen reaction sensitivity and low concentration, can avoid hydrogen embrittlement influence, structure is simple, performance is excellent.