▎ 摘　　要

NOVELTY - The susceptor (110) has a susceptor portion (120) having a first surface for supporting a substrate and a second surface opposite the first surface. A first fluoro polymer layer (234) is arranged on the first surface of the susceptor portion. A graphene layer (236) is arranged on the first fluoro polymer layer. The second surface of the susceptor portion comprises anodized aluminum. USE - Susceptor. ADVANTAGE - The susceptor can permit the substrate to adhere to the susceptor without the use of electric fields or electrostatic forces. The movement between the substrate and the susceptor can be minimized. The defects to the substrate are minimized and thus the substrate evenly coated and/or processed. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of processing a substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a susceptor. Susceptor (110) Susceptor portion (120) Fluoro polymer layer (234) Graphene layer (236)