• 专利标题:   Preparation method of two-dimensional molybdenum disulfide tungsten alloy film, involves continuously introducing argon gas, until tubular furnace is cooled to room temperature, after growth is finished.
  • 专利号:   CN115161615-A
  • 发明人:   ZHANG Q, ZHAN Y, LIN N, ZHANG L
  • 专利权人:   SHANDONG YUNHAI GUOCHUANG CLOUD COMPUTIN
  • 国际专利分类:   C23C016/02, C23C016/30
  • 专利详细信息:   CN115161615-A 11 Oct 2022 C23C-016/02 202293 Chinese
  • 申请详细信息:   CN115161615-A CN10999714 19 Aug 2022
  • 优先权号:   CN10999714

▎ 摘  要

NOVELTY - Preparing two-dimensional molybdenum disulfide tungsten alloy film comprises using sapphire substrate as a substrate to grow graphene, weighing the tungsten trioxide, molybdenum trioxide and sulfur powder, placing the ceramic boat in the tubular furnace, connecting the tube furnace with the vacuum pump, vacuumizing and introducing argon gas to fill the whole quartz tube chamber, heating the growth alloy, after the growth is completed, continuing introducing argon gas, until the furnace is cooled to room temperature. USE - Preparation method of two-dimensional molybdenum tungsten alloy film. ADVANTAGE - The method: is simple and convenient operation, gas flow, growth time, growth temperature and other reaction conditions are mature, and can obtain large area continuous high quality of two-dimensional molybdenum tungsten alloy film. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of two-dimensional of the preparation method of two-dimensional molybdenum disulfide tungsten alloy film (Drawing includes non-English language text).