• 专利标题:   Quality inspection method for graphene films, involves fixing graphene film sample on substrate translation table, and configuring rectangular waveguide antenna to irradiate graphene film samples in test frequency band.
  • 专利号:   CN112986176-A, CN112986176-B
  • 发明人:   CHEN C, ZHANG Z, ZHAO W, YAN J, DI C, QI X, GUO Y, ZHANG Y, ZHANG X
  • 专利权人:   UNIV NORTHWEST
  • 国际专利分类:   G01N021/21, G01N021/3563, G01N021/3581, G01N021/84, G01N021/88
  • 专利详细信息:   CN112986176-A 18 Jun 2021 G01N-021/3581 202157 Pages: 26 Chinese
  • 申请详细信息:   CN112986176-A CN10175607 06 Feb 2021
  • 优先权号:   CN10175607

▎ 摘  要

NOVELTY - The method involves configuring the terahertz vector network analyzer platform in the near-field test environment. The uniformity and crystalline quality of graphene film samples is measured. The uniformity of the graphene film sample is completed by the translational scan test. The crystalline quality of the graphene film sample is completed by the rotating polarization test. The graphene film sample is first fixed on the substrate translation table. The rectangular waveguide antenna is configured to irradiate graphene film samples in the test frequency band. USE - Quality inspection method for graphene films. ADVANTAGE - The method enables avoiding limitation of graphene film quality characterization by a Raman spectrum and an atomic force microscope.