• 专利标题:   Manufacture of graphene for top-gate FETs, involves forming graphene layer on base substrate, attaching target substrate onto layer, and separating graphene layer from base substrate to transfer graphene layer onto target substrate.
  • 专利号:   WO2013129807-A1, KR2013099451-A
  • 发明人:   CHO B, KIM T, SHIN W, YOON T, BYUNG J C, TAE S Y, TAEK S K, WOO C S
  • 专利权人:   KOREA ADVANCED INST SCI TECHNOLOGY
  • 国际专利分类:   B44C001/16, C01B031/02, C23C016/26
  • 专利详细信息:   WO2013129807-A1 06 Sep 2013 C01B-031/02 201363 Pages: 20
  • 申请详细信息:   WO2013129807-A1 WOKR001450 22 Feb 2013
  • 优先权号:   KR020972

▎ 摘  要

NOVELTY - Graphene is obtained by forming (S100) a graphene layer on a base substrate, attaching (S110) a target substrate onto the graphene layer, and separating (S120) the graphene layer from the base substrate to transfer the graphene layer onto the target substrate. USE - Manufacture of graphene for top-gate FETs. ADVANTAGE - The method enables economical and environmentally-friendly mass-production of high-quality uniform graphene, without requiring etching and damaging the substrate, with low defect density. The obtained graphene provides top-gate FETs having excellent bending stability. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart of the manufacturing method of graphene. (Drawing includes non-English language text) Formation of graphene layer (S100) Attachment of target substrate (S110) Separation of graphene layer (S120) Determination of whether to repeat previous processes (S130)