▎ 摘　　要

NOVELTY - Ultra-thin micro heat pipe with a micro-channel capillary structure comprises silicon nitride substrate (1), a bottom layer of graphite (2), and an intermediate layer of graphene (3) arranged in order from bottom to top and provided with top layer of graphite (4). The middle layer of graphene is elongated and arranged at equal intervals at silicon nitride substrate. The bottom graphite and the middle layer graphene have micron-level rectangular channels, where the rectangular channels are rectangles with a cross-sectional width of 3-5 micrometer and a height of 18-22 micrometer, and the middle layer of graphene has a pitch of 120-130 nanometer. USE - Ultra-thin micro heat pipe with a micro-channel capillary structure. ADVANTAGE - The ultra-thin micro heat pipe with a micro-channel capillary structure has high capillary pressure and large slip length so that the flow rate of the working fluid in the heat pipe is significantly increased, and the liquid in the condensation section of the heat pipe quickly returns to the evaporation section. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing an ultra-thin micro heat pipe with a microchannel capillary structure, which involves: (A) using standard photolithography and reactive ion etching to etch a micron-level rectangular channel in the middle of the silicon nitride wafer of the 90-120micrometer thick silicon nitride substrate; (B) covering channel with a layer of graphite with a thickness of 8-15 nanometer by dry transfer, which is marked as bottom layer graphite; (C) covering bottom graphite with graphene containing different layers and etched into equal-spaced long strips by electron beam lithography and oxygen plasma, and marking as the middle layer graphene, and using dry transfer method covers the surface of the underlying graphite and the long sides of the graphene are arranged perpendicular to the microchannel; (D) using oxygen reactive ion etching process for the overlap of the bottom graphite and the middle layer graphene with the micron-level rectangular channels, using the microchannel holes in the silicon nitride wafer as a mask etch away to form a through hole of the same size; and (E) using dry transfer to cover a layer of graphite with a thickness of 90-120 nanometer on the surface of the graphene intermediate layer, which is marked as top layer graphite. DESCRIPTION OF DRAWING(S) - The drawing shows schematic view of ultra-thin micro heat pipe with a micro-channel capillary structure. (Drawing includes non-English language text). Silicon nitride substrate (1) Bottom layer of graphite (2) Intermediate layer of graphene (3) Top layer of graphite (4)