▎ 摘　　要

NOVELTY - The photodetector has a substrate (102), a top intrinsic layer, a buried oxygen layer and a bottom intrinsic layer from top to bottom. The top layer of the substrate is etched to form a multi-mode waveguide (101). Multiple micro-ring structures (103) are located on both sides of the multi-mode waveguide. A first electrode layer is doped and deposited on the surface of the microring structure to form an ohmic contact. A light absorption layer is grown on the first electrode layer. A second electrode layer is doped and deposited on the surface of the light absorption layer. A first electrode (104) is drawn on the first electrode layer. A second electrode (105) is drawn on the second electrode layer. A potential difference is formed between the second electrode and the first electrode to realize photoelectric conversion. USE - Micro-ring-coupled multi-channel integrated photodetector for batch production. ADVANTAGE - The photodetector utilizes the narrow bandwidth coupling performance of the micro-ring structure, integrates the light absorption layer above the micro-ring to realize multi-channel light reception. The device is small in size and easy to integrate. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of a micro-ring coupled multi-channel integrated photodetector. Multi-mode waveguide (101) Substrate (102) Micro-ring structure (103) First electrode (104) Second electrode (105)