• 专利标题:   Production of layered structure involves depositing catalyst structure onto substrate top surface containing non-electroconductive material, depositing graphene structure onto catalyst structure, and partially removing catalyst structure.
  • 专利号:   DE102016200262-A1, US2017198398-A1, CN107039240-A
  • 发明人:   LUTZ T, PURKL F, ROELVER R, ROHLFING F
  • 专利权人:   BOSCH GMBH ROBERT
  • 国际专利分类:   B81C001/00, B82Y030/00, B82Y040/00, C01B032/20, H01L021/02, H01L021/283, H01L021/336, H01L029/16, H01L029/786, C23C016/26, C23C016/56, H01B001/04, H01B005/14, H01L023/13, H01L023/14
  • 专利详细信息:   DE102016200262-A1 13 Jul 2017 H01L-021/02 201749 Pages: 14 German
  • 申请详细信息:   DE102016200262-A1 DE10200262 13 Jan 2016
  • 优先权号:   DE10200262

▎ 摘  要

NOVELTY - Production of layered structure (10) involves providing (i) a substrate (1) comprising a top surface (1a) containing a non-electroconductive material, depositing (ii) a catalyst structure onto the top surface, depositing (iii) a graphene structure (3) onto the catalyst structure, and partially removing (iv) catalyst structure located between the substrate and the graphene structure. USE - Production of layered structure (claimed). ADVANTAGE - The method enables economical production of high-quality layered structure having excellent electrical characteristics and mechanical characteristics, high charge carrier mobility, and suppressed generation of defect such as crack and imperfection at edges. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view explaining the production of layered structure. Substrate (1) Top surface of substrate (1a) Graphene structure (3) Electroconductive region (4) Layered structure (10)